검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of dilute SF6 discharges for application to SiC reactive ion etching Scofield JD, Ganguly BN, Bletzinger P Journal of Vacuum Science & Technology A, 18(5), 2175, 2000 |
| No. | Article |
|---|---|
| 1 |
Investigation of dilute SF6 discharges for application to SiC reactive ion etching Scofield JD, Ganguly BN, Bletzinger P Journal of Vacuum Science & Technology A, 18(5), 2175, 2000 |