검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Electron-beam-based photomask repair Edinger K, Becht H, Bihr J, Boegli V, Budach M, Hofmann T, Koops HWP, Kuschnerus P, Oster J, Spies P, Weyrauch B Journal of Vacuum Science & Technology B, 22(6), 2902, 2004 |
| 2 |
High-throughput electron-beam lithography with a raster-scanned, variably shaped beam Veneklasen LH, Kao HM, Rishton SA, Winter S, Boegli V, Newman T, Bertuccelli G, Howard G, Le P, Tan Z, Lozes R Journal of Vacuum Science & Technology B, 19(6), 2455, 2001 |
| 3 |
Implementation of real-time proximity effect correction in a raster shaped beam tool Boegli V, Johnson L, Kao H, Veneklasen L, Hofmann U, Finkelstein I, Stovall S, Rishton S Journal of Vacuum Science & Technology B, 18(6), 3138, 2000 |
| 4 |
Raster shaped beam pattern generation Rishton SA, Varner JK, Veneklasen LH, Boegli V, Sagle AL, Hofmann U, Kao H, Wang W Journal of Vacuum Science & Technology B, 17(6), 2927, 1999 |
| 5 |
Design and implementation of a real-time hierarchical parallel postprocessor for 100 keV electron beam lithography Muray LP, Anderson EH, Boegli V Journal of Vacuum Science & Technology B, 15(6), 2204, 1997 |
| 6 |
Electron-Beam Lithography Digital Pattern Generator and Electronics for Generalized Curvilinear Structures Anderson EH, Boegli V, Muray LP Journal of Vacuum Science & Technology B, 13(6), 2529, 1995 |
| 7 |
Spatial-Phase-Locked Electron-Beam Lithography - Initial Test-Results Ferrera J, Wong VV, Rishton S, Boegli V, Anderson EH, Kern DP, Smith HI Journal of Vacuum Science & Technology B, 11(6), 2342, 1993 |
| 8 |
Fabrication of Curved Mirrors for Visible Semiconductor-Lasers Using Electron-Beam Lithography and Chemically Assisted Ion-Beam Etching Unger P, Boegli V, Buchmann P, Germann R Journal of Vacuum Science & Technology B, 11(6), 2514, 1993 |
| 9 |
Integrated Approach to Quantum-Dot Fabrication Rishton SA, Lee YH, Milkove KR, Hong JM, Boegli V, Defranza M, Sivan U, Kern DP Journal of Vacuum Science & Technology B, 11(6), 2607, 1993 |