검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electronic and optical properties of Ta1-xZrxN films: Experimental and ab initio studies Aouadi SM, Bohnhoff A, Amriou T, Haasch RT, Williams M, Hilfiker JN Journal of Vacuum Science & Technology A, 23(4), 705, 2005 |
| 2 |
Real-time spectroscopic ellipsometry study of Ta-Si-N ultrathin diffusion barriers Aouadi SM, Zhang Y, Bohnhoff A, Lee J, Williams M Journal of Vacuum Science & Technology A, 23(5), 1359, 2005 |