검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Carrier illumination for characterization of ultrashallow doping profiles Clarysse T, Lindsay R, Vandervorst W, Budiarto E, Borden P Journal of Vacuum Science & Technology B, 22(1), 439, 2004 |
| 2 |
Nondestructive, in-line characterization of device performance parameters of shallow junction processes Kluth GJ, En WG, Borden P, Bechtler L, Nijmeijer R Journal of Vacuum Science & Technology B, 20(2), 640, 2002 |
| 3 |
Nondestructive profile measurements of annealed shallow implants Borden P, Nijmeijer R, Li JP, Bechtler L, Lingel K Journal of Vacuum Science & Technology B, 18(1), 602, 2000 |