검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability Wu M, Moulin J, Coste P, Perrot S, Perrossier JL, Renard C, Bosseboeuf A Thin Solid Films, 616, 543, 2016 |
| 2 |
MEMS Process by Film Transfer Using a Fluorocarbon Anti-Adhesive Layer Schelcher G, Brault S, Parrain F, Lefeuvre E, Dufour-Gergam E, Tatoulian M, Bouville D, Desgeorges M, Verjus F, Bosseboeuf A Journal of the Electrochemical Society, 158(5), H545, 2011 |
| 3 |
Laser doping for microelectronics and microtechnology Sarnet T, Kerrien G, Yaakoubi N, Bosseboeuf A, Dufour-Gergam E, Debarre D, Boulmer J, Kakushima K, Laviron C, Hernandez M, Venturini J, Bourouina T Applied Surface Science, 247(1-4), 537, 2005 |
| 4 |
Accuracy of Thin-Film Stress Measurements with C-Si Microbeams Fabricated by Dry-Etching Boutry M, Bosseboeuf A, Bourouina T, Grandchamp JP, Dufourgergam E, Gilles JP Journal of Vacuum Science & Technology B, 15(5), 1767, 1997 |