검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of chamber wall conditions on Cl and Cl-2 concentrations in an inductively coupled plasma reactor Ullal SJ, Godfrey AR, Edelberg E, Braly L, Vahedi V, Aydil ES Journal of Vacuum Science & Technology A, 20(1), 43, 2002 |