화학공학소재연구정보센터
검색결과 : 18건
No. Article
1 Lanthanide Aluminates as Dielectrics for Non-Volatile Memory Applications: Material Aspects
Adelmann C, Swerts J, Richard O, Conard T, Popovici M, Meersschaut J, Afanas'ev VV, Breuil L, Cacciato A, Opsomer K, Brijs B, Tielens H, Pourtois G, Bender H, Jurczak M, Van Houdt J, Van Elshocht S, Kittl JA
Journal of the Electrochemical Society, 158(8), H778, 2011
2 Degradation of 248 nm Deep UV Photoresist by Ion Implantation
Tsvetanova D, Vos R, Vereecke G, Parac-Vogt TN, Clemente F, Vanstreels K, Radisic D, Conard T, Franquet A, Jivanescu M, Nguyen DAP, Stesmans A, Brijs B, Mertens P, Heyns MM
Journal of the Electrochemical Society, 158(8), H785, 2011
3 Si passivation for Ge pMOSFETs: Impact of Si cap growth conditions
Vincent B, Loo R, Vandervorst W, Delmotte J, Douhard B, Valev VK, Vanbel M, Verbiest T, Rip J, Brijs B, Conard T, Claypool C, Takeuchi S, Zaima S, Mitard J, De Jaeger B, Dekoster J, Caymax M
Solid-State Electronics, 60(1), 116, 2011
4 Atomic Layer Deposition of Strontium Titanate Films Using Sr((Bu3Cp)-Bu-t)(2) and Ti(OMe)(4)
Popovici M, Van Elshocht S, Menou N, Swerts J, Pierreux D, Delabie A, Brijs B, Conard T, Opsomer K, Maes JW, Wouters DJ, Kittl JA
Journal of the Electrochemical Society, 157(1), G1, 2010
5 High Ge content SGOI substrates obtained by the Ge condensation technique: A template for growth of strained epitaxial Ge
Souriau L, Terzieva V, Vandervorst W, Clemente F, Brijs B, Moussa A, Meuris M, Loo R, Caymax M
Thin Solid Films, 517(1), 23, 2008
6 Shallow junction ion implantation in Ge and associated defect control
Satta A, Simoen E, Janssens T, Clarysse T, De Jaeger B, Benedetti A, Hoflijk I, Brijs B, Meuris M, Vandervorst W
Journal of the Electrochemical Society, 153(3), G229, 2006
7 Scaling to sub-1 nm equivalent oxide thickness with hafnium oxide deposited by atomic layer deposition
Delabie A, Caymax M, Brijs B, Brunco DP, Conard T, Sleeckx E, Van Elshocht S, Ragnarsson LA, De Gendt S, Heyns MM
Journal of the Electrochemical Society, 153(8), F180, 2006
8 Metallorganic chemical vapor deposition of dysprosium scandate high-k layers using mmp-type precursors
Van Elshocht S, Lehnen P, Seitzinger B, Abrutis A, Adelmann C, Brijs B, Caymax M, Conard T, De Gendt S, Franquet A, Lohe C, Lukosius M, Moussa A, Richard O, Williams P, Witters T, Zimmerman P, Heyns M
Journal of the Electrochemical Society, 153(9), F219, 2006
9 N-2 as carrier gas: an alternative to H-2 for enhanced epitaxy of Si, SiGe and SiGe : C
Meunier-Beillard P, Caymax M, Van Nieuwenhuysen K, Doumen G, Brijs B, Hopstaken M, Geenen L, Vandervorst W
Applied Surface Science, 224(1-4), 31, 2004
10 Errors in near-surface and interfacial profiling of boron and arsenic
Vandervorst W, Janssens T, Brijs B, Conard T, Huyghebaert C, Fruhauf J, Bergmaier A, Dollinger G, Buyuklimanli T, VandenBerg JA, Kimura K
Applied Surface Science, 231-2, 618, 2004