검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
157 nm resist materials: Progress report Brodsky C, Byers J, Conley W, Hung R, Yamada S, Patterson K, Somervell M, Trinque B, Tran HV, Cho S, Chiba T, Lin SH, Jamieson A, Johnson H, Vander Heyden T, Willson CG Journal of Vacuum Science & Technology B, 18(6), 3396, 2000 |