검색결과 : 1건
No. | Article |
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1 |
Ion implantation by vacuum arc plasmas Schuelke T, Witke T, Brueckner J Journal of Vacuum Science & Technology B, 17(2), 867, 1999 |
No. | Article |
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1 |
Ion implantation by vacuum arc plasmas Schuelke T, Witke T, Brueckner J Journal of Vacuum Science & Technology B, 17(2), 867, 1999 |