검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A Study of Silicon Epitaxial-Growth on Silicon Substrates Exposed to Ar Electron-Cyclotron-Resonance Plasmas Buaud PP, Hu YZ, Spanos L, Irene EA, Christensen KN, Venables D, Maher DM Journal of Vacuum Science & Technology B, 13(4), 1442, 1995 |
| 2 |
In-Situ Electron-Cyclotron-Resonance Plasma Surface Cleaning of Silicon Hu YZ, Buaud PP, Spanos L, Wang YQ, Li M, Irene EA Journal of Vacuum Science & Technology A, 12(4), 1315, 1994 |