검색결과 : 1건
No. | Article |
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1 |
Fabrication of High-Performance 512K Static-Random Access Memories in 0.25 Mu-M Complementary Metal-Oxide-Semiconductor Technology Using X-Ray-Lithography Viswanathan R, Seeger D, Bright A, Bucelot T, Pomerene A, Petrillo K, Blauner P, Agnello P, Warlaumont J, Conway J, Patel D Journal of Vacuum Science & Technology B, 11(6), 2910, 1993 |