검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel method for cleaning a vacuum chamber from hydrocarbon contamination Wanzenboeck HD, Roediger P, Hochleitner G, Bertagnolli E, Buehler W Journal of Vacuum Science & Technology A, 28(6), 1413, 2010 |
| No. | Article |
|---|---|
| 1 |
Novel method for cleaning a vacuum chamber from hydrocarbon contamination Wanzenboeck HD, Roediger P, Hochleitner G, Bertagnolli E, Buehler W Journal of Vacuum Science & Technology A, 28(6), 1413, 2010 |