검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low Dielectric-Constant, Fluorine-Doped SiO2 for Intermetal Dielectric Denison DR, Barbour JC, Burkhart JH Journal of Vacuum Science & Technology A, 14(3), 1124, 1996 |
| No. | Article |
|---|---|
| 1 |
Low Dielectric-Constant, Fluorine-Doped SiO2 for Intermetal Dielectric Denison DR, Barbour JC, Burkhart JH Journal of Vacuum Science & Technology A, 14(3), 1124, 1996 |