검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Radio-Frequency Diagnostics for Plasma Etch Systems Bushman S, Edgar TF, Trachtenberg I Journal of the Electrochemical Society, 144(2), 721, 1997 |
| 2 |
Modeling of Plasma Etch Systems Using Ordinary Least-Squares, Recurrent Neural-Network, and Projection to Latent Structure Models Bushman S, Edgar TF, Trachtenberg I Journal of the Electrochemical Society, 144(4), 1379, 1997 |