검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Modeling the plasma chemistry of C2F6 and CHF3 etching of silicon dioxide, with comparisons to etch rate and diagnostic data Ho P, Johannes JE, Buss RJ, Meeks E Journal of Vacuum Science & Technology A, 19(5), 2344, 2001 |
| 2 |
Chemical kinetics in chemical vapor deposition: growth of silicon dioxide from tetraethoxysilane (TEOS) Coltrin ME, Ho P, Moffat HK, Buss RJ Thin Solid Films, 365(2), 251, 2000 |
| 3 |
Simulations of BCl3/Cl-2/Ar plasmas with comparisons to diagnostic data Meeks E, Ho P, Ting AL, Buss RJ Journal of Vacuum Science & Technology A, 16(4), 2227, 1998 |
| 4 |
Synthesis of Silicon-Nitride Particles in Pulsed Radio-Frequency Plasmas Buss RJ, Babu SV Journal of Vacuum Science & Technology A, 14(2), 577, 1996 |
| 5 |
Solid-State Hydrogen Sensors Using Palladium-Nickel Alloys - Effect of Alloy Composition on Sensor Response Hughes RC, Schubert WT, Buss RJ Journal of the Electrochemical Society, 142(1), 249, 1995 |