검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Performance Enhancements on IBMs El-4 Electron-Beam Lithography System Butsch R, Enichen WA, Gordon MS, Groves TR, Hartley JG, Pavick JW, Pfeiffer HC, Quickle RJ, Rockrohr JD, Stickel W Journal of Vacuum Science & Technology B, 13(6), 2478, 1995 |