검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Evolution of etch profile in etching of CoFeB thin films using high density plasma reactive ion etching Bin Xiao Y, Kim EH, Kong SM, Chung CW Thin Solid Films, 519(20), 6673, 2011 |
| 2 |
Etch characteristics of FePt magnetic thin films using inductively coupled plasma reactive ion etching Kim EH, Bin Xiao Y, Kong SM, Chung CW Thin Solid Films, 519(23), 8223, 2011 |