검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ion-enhanced etching of Si(100) with molecular chlorine: Reaction mechanisms and product yields Goodman RS, Materer N, Leone SR Journal of Vacuum Science & Technology A, 17(6), 3340, 1999 |
| 2 |
Molecular-Dynamics Simulation of Atomic Layer Etching of Silicon Athavale SD, Economou DJ Journal of Vacuum Science & Technology A, 13(3), 966, 1995 |