검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Co-sputter deposited Ta-Si diffusion barrier between Si and Cu: the effects of Si content on the barrier property Lee YJ, Suh BS, Park CO Thin Solid Films, 357(2), 237, 1999 |
| No. | Article |
|---|---|
| 1 |
Co-sputter deposited Ta-Si diffusion barrier between Si and Cu: the effects of Si content on the barrier property Lee YJ, Suh BS, Park CO Thin Solid Films, 357(2), 237, 1999 |