검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Helicon Plasma Source Excited by a Flat Spiral Coil Stevens JE, Sowa MJ, Cecchi JL Journal of Vacuum Science & Technology A, 13(5), 2476, 1995 |
| No. | Article |
|---|---|
| 1 |
Helicon Plasma Source Excited by a Flat Spiral Coil Stevens JE, Sowa MJ, Cecchi JL Journal of Vacuum Science & Technology A, 13(5), 2476, 1995 |