검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Penning type magnetron sputtering source and its use in the production of carbon nitride coatings Murphy MJ, Monaghan J, Tyrrell M, Walsh R, Cameron DG, Chowdhury AKMS, Monclus M, Hashmi MSJ Journal of Vacuum Science & Technology A, 17(1), 62, 1999 |