화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 2-Dimensional Junction Profiling by Selective Chemical Etching - Applications to Electron Device Characterization
Spinella C, Raineri V, Lavia F, Campisano SU
Journal of Vacuum Science & Technology B, 14(1), 414, 1996
2 Characterization by X-Ray Photoelectron-Spectroscopy of the Chemical-Structure of Semiinsulating Polycrystalline Silicon Thin-Films
Iacona F, Lombardo S, Campisano SU
Journal of Vacuum Science & Technology B, 14(4), 2693, 1996
3 Selective Etching of B-Doped Silicon - Mechanisms and 2-Dimensional Delineation of Concentration Profiles
Spinella C, Raineri V, Campisano SU
Journal of the Electrochemical Society, 142(5), 1601, 1995