검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Modeling of Silicon-Nitride Deposition by RF Plasma-Enhanced Chemical-Vapor-Deposition Masi M, Besana G, Canzi L, Carra S Chemical Engineering Science, 49(5), 669, 1994 |
| No. | Article |
|---|---|
| 1 |
Modeling of Silicon-Nitride Deposition by RF Plasma-Enhanced Chemical-Vapor-Deposition Masi M, Besana G, Canzi L, Carra S Chemical Engineering Science, 49(5), 669, 1994 |