화학공학소재연구정보센터
검색결과 : 10건
No. Article
1 Reactive bipolar pulsed dual magnetron sputtering of ZrN films: The effect of duty cycle
Rizzo A, Valerini D, Capodieci L, Mirenghi L, Di Benedetto F, Protopapa ML
Applied Surface Science, 427, 994, 2018
2 Aluminum-doped zinc oxide coatings on polylactic acid films for antimicrobial food packaging
Valerini D, Tammaro L, Di Benedetto F, Vigliotta G, Capodieci L, Terzi R, Rizzo A
Thin Solid Films, 645, 187, 2018
3 Electrophoretically Deposited Polymeric Films: Evidence of Correlation between Electrochemical Impedance Spectroscopy Measurements and Morphological Properties
De Riccardis MF, Carbone D, Capodieci L
Journal of the Electrochemical Society, 162(11), D3071, 2015
4 Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour-nitrogen radiofrequency magnetron sputtering
Signore MA, Rizzo A, Tapfer L, Piscopiello E, Capodieci L, Cappello A
Thin Solid Films, 518(8), 1943, 2010
5 Influence of growth rate on the structural and morphological properties of TiN, ZrN and TiN/ZrN multilayers
Rizzo A, Signore MA, De Riccardis MF, Capodieci L, Dimaio D, Nocco T
Thin Solid Films, 515(17), 6665, 2007
6 Screening layouts for high-numerical aperture and polarization effects using pattern matching
McIntyre GR, Holwill J, Neureuther A, Capodieci L, Zou Y, Levinson H, Kye J
Journal of Vacuum Science & Technology B, 23(6), 2646, 2005
7 Effects of chrome pattern characteristics on image placement due to thermomechanical distortion of optical reticles during exposure
Abdo A, Capodieci L, Lalovic I, Engelstad R
Journal of Vacuum Science & Technology B, 21(6), 3052, 2003
8 Novel methodology for postexposure bake calibration and optimization based on electrical linewidth measurement and process metamodeling
Capodieci L, Subramanian R, Rangarajan B, Heavlin WD, Li JW, Bernard DA, Boksha VV
Journal of Vacuum Science & Technology B, 16(6), 3752, 1998
9 Extendibility of X-Ray-Lithography to Less-Than-or-Equal-to-130 nm Ground Rules in Complex Integrated-Circuit Patterns
Hector S, Chu W, Thompson M, Pol V, Dauksher B, Cummings K, Resnick D, Pendharkar S, Maldonado J, Mccord M, Krasnoperova A, Liebmann L, Silverman J, Guo J, Khan M, Bollepalli S, Capodieci L, Cerrina F
Journal of Vacuum Science & Technology B, 14(6), 4288, 1996
10 Novel Postexposure Bake Simulator - First Results
Capodieci L, Krasnoperova A, Cerrina F, Lyons C, Spence C, Early K
Journal of Vacuum Science & Technology B, 13(6), 2963, 1995