검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Conformal aluminum oxide coating of high aspect ratio structures using metalorganic chemical vapor deposition Wiest F, Capodieci V, Blank O, Gutsche M, Schulze J, Eisele I, Matusche J, Schmidt UI Thin Solid Films, 496(2), 240, 2006 |