검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Variations in the physico-chemical properties of near-stoichiometric silica deposited from SiH4-N2O and SiH4-N2O-He radiofrequency discharges Chayani M, Caquineau H, Despax B, Bandet J, Berjoan R Thin Solid Films, 471(1-2), 53, 2005 |
| 2 |
Influence of the relative humidity on film formation by vapor induced phase separation Caquineau H, Menut P, Deratani A, Dupuy C Polymer Engineering and Science, 43(4), 798, 2003 |
| 3 |
Influence of the Reactor Design in the Case of Silicon-Nitride PECVD Caquineau H, Despax B Chemical Engineering Science, 52(17), 2901, 1997 |
| 4 |
Reactor Modeling for Radio-Frequency Plasma Deposition of Sinxhy - Comparison Between 2 Reactor Designs Caquineau H, Dupont G, Despax B, Couderc JP Journal of Vacuum Science & Technology A, 14(4), 2071, 1996 |