검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Comparative study of Cl-2, Cl-2/O-2, and Cl-2/N-2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP Carlstrom CF, van der Heijden R, Andriesse MSP, Karouta F, van der Heijden RW, van der Drift E, Salemink HWM Journal of Vacuum Science & Technology B, 26(5), 1675, 2008 |
| 2 |
Cl-2/O-2-inductively coupled plasma etching of deep hole-type photonic crystals in InP Carlstrom CF, van der Heijden R, Karouta F, van der Heijden RW, Salemink HWM, van der Drift E Journal of Vacuum Science & Technology B, 24(1), L6, 2006 |
| 3 |
Characterization of mass-transport grown GaN by hydride vapour-phase epitaxy Paskova T, Paskov PP, Goldys EM, Valcheva E, Darakchieva V, Sodervall U, Godlewski M, Zielinski M, Hautakangas S, Saarinen K, Carlstrom CF, Wahab Q, Monemar B Journal of Crystal Growth, 273(1-2), 118, 2004 |
| 4 |
Characterization of damage in InP dry etched using nitrogen containing chemistries Carlstrom CF, Anand S Journal of Vacuum Science & Technology B, 19(5), 1905, 2001 |
| 5 |
Buried heterostructure complex-coupled distributed feedback 1.55 mu m lasers fabricated using dry etching processes and quaternary layer overgrowth Soderstrom D, Lourdudoss S, Carlstrom CF, Anand S, Kahn M, Kamp M Journal of Vacuum Science & Technology B, 17(6), 2622, 1999 |
| 6 |
Trimethylamine: Novel source far low damage reactive ion beam etching of InP Carlstrom CF, Anand S, Landgren G Journal of Vacuum Science & Technology B, 17(6), 2660, 1999 |
| 7 |
Extremely smooth surface morphologies in N-2/H-2/CH4 based low energy chemically assisted ion beam etching of InP GaInAsP Carlstrom CF, Anand S, Landgren G Thin Solid Films, 343-344, 374, 1999 |
| 8 |
Low energy ion beam etching of InP using methane chemistry Carlstrom CF, Landgren G, Anand S Journal of Vacuum Science & Technology B, 16(3), 1018, 1998 |