검색결과 : 4건
No. | Article |
---|---|
1 |
Ultralow-energy SIMS for shallow semiconductor depth profiling Chanbasha AR, Wee ATS Applied Surface Science, 255(4), 1307, 2008 |
2 |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry Chanbasha AR, Wee ATS Journal of Vacuum Science & Technology B, 25(1), 277, 2007 |
3 |
Narrow surface transient and high depth resolution SIMS using 250 eV O-2(+) Chanbasha AR, Wee ATS Applied Surface Science, 252(19), 7243, 2006 |
4 |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O-2(+) secondary-ion-mass spectrometry Chanbasha AR, Wee ATS Journal of Vacuum Science & Technology B, 24(2), 547, 2006 |