화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Ultralow-energy SIMS for shallow semiconductor depth profiling
Chanbasha AR, Wee ATS
Applied Surface Science, 255(4), 1307, 2008
2 Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry
Chanbasha AR, Wee ATS
Journal of Vacuum Science & Technology B, 25(1), 277, 2007
3 Narrow surface transient and high depth resolution SIMS using 250 eV O-2(+)
Chanbasha AR, Wee ATS
Applied Surface Science, 252(19), 7243, 2006
4 Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O-2(+) secondary-ion-mass spectrometry
Chanbasha AR, Wee ATS
Journal of Vacuum Science & Technology B, 24(2), 547, 2006