검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Determination of the electrical properties of ultrathin silicon-based dielectric films: thermally grown SiNx Pic N, Glachant A, Nitsche S, Hoarau JY, Goguenheim D, Vuillaume D, Sibai A, Chaneliere C Solid-State Electronics, 45(8), 1265, 2001 |
| 2 |
Silicon-Nitride and Oxynitride Deposition by RT-LPCVD Semmache B, Lemiti M, Chaneliere C, Dubois C, Sibai A, Canut B, Laugier A Thin Solid Films, 296(1-2), 32, 1997 |