검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive Ion Etching of Alingap and GaAs in Sicl4/CH4/Ar-Based Plasmas Chang CV, Rijpers JC Journal of Vacuum Science & Technology B, 12(2), 536, 1994 |
| No. | Article |
|---|---|
| 1 |
Reactive Ion Etching of Alingap and GaAs in Sicl4/CH4/Ar-Based Plasmas Chang CV, Rijpers JC Journal of Vacuum Science & Technology B, 12(2), 536, 1994 |