검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Basic constraints for a multibeam lithography column Mankos M, Coyle S, Fernandez A, Sagle A, Owens W, Sullivan J, Chang THP Journal of Vacuum Science & Technology B, 19(2), 467, 2001 |
| 2 |
Multisource optimization of a column for electron lithography Mankos M, Coyle S, Fernandez A, Sagle A, Allen P, Owens W, Sullivan J, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3010, 2000 |
| 3 |
Optimization of microcolumn electron optics for high-current applications Mankos M, Lee KY, Muray L, Spallas J, Hsu Y, Stebler C, DeVore W, Bullock E, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3057, 2000 |
| 4 |
Advances in arrayed microcolumn lithography Muray LP, Spallas JP, Stebler C, Lee K, Mankos M, Hsu Y, Gmur M, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3099, 2000 |
| 5 |
1 kV resist technology for microcolumn-based electron-beam lithography Lee KY, Hsu Y, Le P, Tan ZCH, Chang THP, Elian K Journal of Vacuum Science & Technology B, 18(6), 3408, 2000 |
| 6 |
Performance of Zr/O/W Schottky emitters at reduced temperatures Kim HS, Yu ML, Thomson MGR, Kratschmer E, Chang THP Journal of Vacuum Science & Technology B, 15(6), 2284, 1997 |
| 7 |
Minimum emission current of liquid metal ion sources Beckman JC, Chang THP, Wagner A, Pease RFW Journal of Vacuum Science & Technology B, 15(6), 2332, 1997 |