검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparison of Different Analytical Techniques in Measuring the Surface Region of Ultrashallow Doping Profiles Felch SB, Chapek DL, Malik SM, Maillot P, Ishida E, Magee CW Journal of Vacuum Science & Technology B, 14(1), 336, 1996 |
| 2 |
Structural Characterization of Plasma-Doped Silicon by High-Resolution X-Ray-Diffraction Chapek DL, Conrad JR, Matyi RJ, Felch SB Journal of Vacuum Science & Technology B, 12(2), 951, 1994 |