검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Advances in the deposition of microcrystalline silicon at high rate by distributed electron cyclotron resonance Cabarrocas PRI, Bulkin P, Daineka D, Dao TH, Leempoel P, Descamps P, de Meerendre TK, Charliac J Thin Solid Films, 516(20), 6834, 2008 |
| 2 |
Distributed electron cyclotron resonance plasma: A technology for large area deposition of device-quality a-Si : H at very high rate Leempoel P, Descamps P, de Meerendre TK, Charliac J, Cabarrocas PRI, Bulkin P, Daineka D, Dao TH, Kleider JP, Gueunier-Farret ME, Longeaud C Thin Solid Films, 516(20), 6853, 2008 |