검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Chemical-Vapor-Deposition of Copper Thin-Films Using New Organometallic Precursors with Alkoxysilylolefin Ligands Senzaki Y, Kobayashi M, Charneski LJ, Nguyen T Journal of the Electrochemical Society, 144(6), L154, 1997 |
| 2 |
Manufacturability of Chemical-Vapor-Deposition of Copper Nguyen T, Charneski LJ, Hsu ST Journal of the Electrochemical Society, 144(8), 2829, 1997 |
| 3 |
Temperature-Dependence of the Morphology of Copper Sputter-Deposited on Tin-Coated Substrates Nguyen T, Charneski LJ, Evans DR Journal of the Electrochemical Society, 144(10), 3634, 1997 |