검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production Maruyama T, Machida Y, Sugatani S, Tsuchikawa H, Hoshino H, Ito M, Tago H, Chau LL, Lee S, Komami H Journal of Vacuum Science & Technology B, 27(6), 2532, 2009 |