검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nano-scratch evaluations of copper chemical mechanical polishing Fu WE, Chen CCA, Huang KW, Chang YQ, Lin TY, Chang CS, Chen JS Thin Solid Films, 529, 306, 2013 |
| 2 |
Passivation layer effect on surface integrity induced by Cu-CMP Fu WE, Chen CCA, Lin YD, Chang YQ, Huang YH Thin Solid Films, 519(15), 4874, 2011 |
| 3 |
Surface qualities after chemical-mechanical polishing on thin films Fu WE, Lin TY, Chen MK, Chen CCA Thin Solid Films, 517(17), 4909, 2009 |
| 4 |
Shrinkage analysis on convex shell by injection molding Chen CCA, Chang SW International Polymer Processing, 23(1), 65, 2008 |