검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ion-Induced Chemical-Vapor-Deposition of High-Purity Cu Films at Room-Temperature Using a Microwave-Discharge H Atom Beam Source Chiang TP, Sawin HH, Thompson CV Journal of Vacuum Science & Technology A, 15(5), 2677, 1997 |
| 2 |
Surface Kinetic-Study of Ion-Induced Chemical-Vapor-Deposition of Copper for Focused Ion-Beam Applications Chiang TP, Sawin HH, Thompson CV Journal of Vacuum Science & Technology A, 15(6), 3104, 1997 |