검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of silicon strain in shallow trench isolation Belyansky M, Klymko N, Conti R, Chidambarrao D, Liu F Journal of Vacuum Science & Technology A, 28(4), 829, 2010 |
| 2 |
Backside sputter depth profiling of phosphorus diffusion from a polysilicon source Ronsheim P, Chidambarrao D, Jagannathan B, Hunt D Journal of Vacuum Science & Technology B, 20(1), 448, 2002 |