화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications
Berdova M, Wiemer C, Lamperti A, Tallarida G, Cianci E, Lamagna L, Losa S, Rossini S, Somaschini R, Gioveni S, Fanciulli M, Franssila S
Applied Surface Science, 368, 470, 2016
2 Engineering organic/inorganic alumina-based films as dielectrics for red organic light emitting transistors
Soldano C, Generali G, Cianci E, Tallarida G, Fanciulli M, Muccini M
Thin Solid Films, 616, 408, 2016
3 Electrically detected magnetic resonance study of the Ge dangling bonds at the Ge(111)/GeO2 interface after capping with Al2O3 layer
Paleari S, Molle A, Accetta F, Lamperti A, Cianci E, Fanciulli M
Applied Surface Science, 291, 3, 2014
4 Effect on Al:MO2/In0.53Ga0.47As interface (M = Hf, Zr) of trimethyl-aluminum pre-treatment during atomic layer deposition
Lamperti A, Molle A, Cianci E, Wiemer C, Spiga S, Fanciulli M
Thin Solid Films, 563, 44, 2014
5 Atomic layer-deposited Al-HfO2/SiO2 bi-layers towards 3D charge trapping non-volatile memory
Congedo G, Wiemer C, Lamperti A, Cianci E, Molle A, Volpe FG, Spiga S
Thin Solid Films, 533, 9, 2013
6 Stabilization of tetragonal/cubic phase in Fe doped zirconia grown by atomic layer deposition
Lamperti A, Cianci E, Ciprian R, Sangalli D, Debernardi A
Thin Solid Films, 533, 83, 2013
7 Atomic layer deposited TiO2 for implantable brain-chip interfacing devices
Cianci E, Lattanzio S, Seguini G, Vassanelli S, Fanciulli M
Thin Solid Films, 520(14), 4745, 2012
8 Resistive switching characteristics of NiO films deposited on top of W or Cu pillar bottom electrodes
Dumas C, Deleruyelle D, Demolliens A, Muller C, Spiga S, Cianci E, Fanciulli M, Tortorelli I, Bez R
Thin Solid Films, 519(11), 3798, 2011
9 Analysis of stress and composition of silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition for microfabrication processes
Cianci E, Pirola F, Foglietti V
Journal of Vacuum Science & Technology B, 23(1), 168, 2005
10 Structural morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature
Caliendo C, Imperatori P, Cianci E
Thin Solid Films, 441(1-2), 32, 2003