1 |
Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications Berdova M, Wiemer C, Lamperti A, Tallarida G, Cianci E, Lamagna L, Losa S, Rossini S, Somaschini R, Gioveni S, Fanciulli M, Franssila S Applied Surface Science, 368, 470, 2016 |
2 |
Engineering organic/inorganic alumina-based films as dielectrics for red organic light emitting transistors Soldano C, Generali G, Cianci E, Tallarida G, Fanciulli M, Muccini M Thin Solid Films, 616, 408, 2016 |
3 |
Electrically detected magnetic resonance study of the Ge dangling bonds at the Ge(111)/GeO2 interface after capping with Al2O3 layer Paleari S, Molle A, Accetta F, Lamperti A, Cianci E, Fanciulli M Applied Surface Science, 291, 3, 2014 |
4 |
Effect on Al:MO2/In0.53Ga0.47As interface (M = Hf, Zr) of trimethyl-aluminum pre-treatment during atomic layer deposition Lamperti A, Molle A, Cianci E, Wiemer C, Spiga S, Fanciulli M Thin Solid Films, 563, 44, 2014 |
5 |
Atomic layer-deposited Al-HfO2/SiO2 bi-layers towards 3D charge trapping non-volatile memory Congedo G, Wiemer C, Lamperti A, Cianci E, Molle A, Volpe FG, Spiga S Thin Solid Films, 533, 9, 2013 |
6 |
Stabilization of tetragonal/cubic phase in Fe doped zirconia grown by atomic layer deposition Lamperti A, Cianci E, Ciprian R, Sangalli D, Debernardi A Thin Solid Films, 533, 83, 2013 |
7 |
Atomic layer deposited TiO2 for implantable brain-chip interfacing devices Cianci E, Lattanzio S, Seguini G, Vassanelli S, Fanciulli M Thin Solid Films, 520(14), 4745, 2012 |
8 |
Resistive switching characteristics of NiO films deposited on top of W or Cu pillar bottom electrodes Dumas C, Deleruyelle D, Demolliens A, Muller C, Spiga S, Cianci E, Fanciulli M, Tortorelli I, Bez R Thin Solid Films, 519(11), 3798, 2011 |
9 |
Analysis of stress and composition of silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition for microfabrication processes Cianci E, Pirola F, Foglietti V Journal of Vacuum Science & Technology B, 23(1), 168, 2005 |
10 |
Structural morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature Caliendo C, Imperatori P, Cianci E Thin Solid Films, 441(1-2), 32, 2003 |