검색결과 : 1건
No. | Article |
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1 |
Diagnoses of inductively coupled SF6 and N-2 plasmas at atmospheric pressure Paul KC, Hatazawa S, Takahashi M, Cliteur GJ, Sakuta T Thin Solid Films, 345(1), 134, 1999 |
No. | Article |
---|---|
1 |
Diagnoses of inductively coupled SF6 and N-2 plasmas at atmospheric pressure Paul KC, Hatazawa S, Takahashi M, Cliteur GJ, Sakuta T Thin Solid Films, 345(1), 134, 1999 |