검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evolution of etch profile in etching of CoFeB thin films using high density plasma reactive ion etching Bin Xiao Y, Kim EH, Kong SM, Chung CW Thin Solid Films, 519(20), 6673, 2011 |
| No. | Article |
|---|---|
| 1 |
Evolution of etch profile in etching of CoFeB thin films using high density plasma reactive ion etching Bin Xiao Y, Kim EH, Kong SM, Chung CW Thin Solid Films, 519(20), 6673, 2011 |