검색결과 : 1건
No. | Article |
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1 |
Anisotropic etching of CoFeB magnetic thin films in C2H5OH/Ar plasma Choi JS, Garay AA, Hwang SM, Lee JY, Cho DH, Chung CW Thin Solid Films, 637, 49, 2017 |
No. | Article |
---|---|
1 |
Anisotropic etching of CoFeB magnetic thin films in C2H5OH/Ar plasma Choi JS, Garay AA, Hwang SM, Lee JY, Cho DH, Chung CW Thin Solid Films, 637, 49, 2017 |