검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of Free Radical Activation for Low Temperature Si to Si Wafer Bonding Byun KY, Ferain I, Colinge C Journal of the Electrochemical Society, 157(1), H109, 2010 |
| 2 |
Room temperature wafer bonding using oxygen plasma treatment in reactive ion etchers with and without inductively coupled plasma Sanz-Velasco A, Amirfeiz P, Bengtsson S, Colinge C Journal of the Electrochemical Society, 150(2), G155, 2003 |