검색결과 : 1건
No. | Article |
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1 |
Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics Carlotti G, Colpani P, Piccolo D, Santucci S, Senez V, Socino G, Verdini L Thin Solid Films, 414(1), 99, 2002 |
No. | Article |
---|---|
1 |
Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics Carlotti G, Colpani P, Piccolo D, Santucci S, Senez V, Socino G, Verdini L Thin Solid Films, 414(1), 99, 2002 |