| 1 |
Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization
Chen Y, Li ZN, Miao NM
Applied Surface Science, 314, 180, 2014 |
| 2 |
Polishing behavior of PS/CeO2 hybrid microspheres with controlled shell thickness on silicon dioxide CMP
Chen Y, Long RW
Applied Surface Science, 257(20), 8679, 2011 |
| 3 |
Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper
Zhang L, Wang HB, Zhang ZF, Qin F, Liu WL, Song ZT
Applied Surface Science, 258(3), 1217, 2011 |
| 4 |
Chemical mechanical polishing of hard disk substrate with alpha-alumina-g-polystyrene sulfonic acid composite abrasive
Lei H, Bu NJ, Chen RL, Hao P, Neng SM, Tu XF, Yuen K
Thin Solid Films, 518(14), 3792, 2010 |
| 5 |
Preparation of alpha-alumina-g-polyacrylamide composite abrasive and chemical mechanical polishing behavior
Lei H, Lu HS, Luo JB, Lu XC
Thin Solid Films, 516(10), 3005, 2008 |
