검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of chemical vapor deposited amorphous fluorocarbons for low dielectric constant interlayer dielectrics Banerjee I, Harker M, Wong L, Coon PA, Gleason KK Journal of the Electrochemical Society, 146(6), 2219, 1999 |