검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering Costa AK, Camargo SS, Achete CA, Carius R Thin Solid Films, 377-378, 243, 2000 |
| 2 |
Magnetron sputtering SiC films investigated by AFM Simao RA, Costa AK, Achete CA, Camargo SS Thin Solid Films, 377-378, 490, 2000 |