검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
{311} defect evolution in ion-implanted, relazed Si1-xGex Crosby R, Jones KS, Law ME, Larsen AN, Hansen JL Journal of Vacuum Science & Technology B, 22(1), 468, 2004 |
| 2 |
Formation of p(+) shallow junctions using SiGe barriers Thompson PE, Crosby R, Bennett J, Felch S Journal of Vacuum Science & Technology B, 22(5), 2333, 2004 |