검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Thermal decomposition of low dielectric constant pulsed plasma fluorocarbon films - I. Effect of precursors and substrate temperature Cruden B, Chu K, Gleason K, Sawin H Journal of the Electrochemical Society, 146(12), 4590, 1999 |
| 2 |
Thermal decomposition of low dielectric constant pulsed plasma fluorocarbon films - II. Effect of postdeposition annealing and ambients Cruden B, Chu K, Gleason K, Sawin H Journal of the Electrochemical Society, 146(12), 4597, 1999 |