검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influences of Ti, TiN, Ta and TaN layers on integration of low-k SiOC : H and Cu Tsai KC, Wu WF, Chao CG, Hsu JL, Chiang CF Materials Chemistry and Physics, 104(1), 18, 2007 |
| No. | Article |
|---|---|
| 1 |
Influences of Ti, TiN, Ta and TaN layers on integration of low-k SiOC : H and Cu Tsai KC, Wu WF, Chao CG, Hsu JL, Chiang CF Materials Chemistry and Physics, 104(1), 18, 2007 |